采用等离子体基氧离子注入技术对Ti6Al4V合金进行表面处理.注入电压选取- 50 kV,注入剂量为4.5×1017 ions/cm2.氧离子注入后对注入样品进行不同温度的真空退火处理.真空退火后,样品表面形貌发生显著变化.随着退火温度增加,先后出现点状、条状缺陷和浅白色块状区.500℃真空退火后样品表面粗糙度变化不大,600℃真空退火后样品表面粗糙度急剧增加.真空退火导致注氧层中氧流失,并且不能在注氧层中析出结晶相.
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