用溶液聚合法合成了水溶性丙烯酸树脂,并以该树脂为成膜物质制备了水溶性感光干膜.傅立叶-红外光谱和1HNMR分析表明,丙烯酸树脂中不合C=C不饱和双键,基本不参与紫外光固化反应.感光干膜性能测试表明,干膜中丙烯酸树脂的酸值及重均分子量会影响干膜的解析度和附着力等性能.进一步的研究表明,曝光能量、感光级数和显影时间也会直接影响干膜的性能.以30μm厚度干膜Ⅱ为例,为获得较好的性能,丙烯酸树脂中甲基丙烯酸含量范围为21.5％～23.8％,重均分子量范围为6.00×104～7.54×104,曝光能量设定40～60 mJ/cm2,感光级数为18～23/41ST,显影时间40～50 s,在此条件下,干膜的解析度可以达到30 μm,附着力为20 μm,干膜线路的侧边形貌和尺寸稳定性良好.此外,感光干膜中丙烯酸酯的比例和种类也会影响干膜的各方面性能,通过调节干膜中各组分含量的比例可以优化干膜性能.
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