采用分子动力学方法模拟Ti在Al(001)表面的薄膜生长过程,计算不同入射角度下Ti薄膜的表面粗糙度、堆积密度、径向分布函数、键对含量比.结果表明,当入射角度小于30°时,其对Ti薄膜粗糙度、堆积密度的影响很小,而当入射角度大于30°时,Ti薄膜粗糙度增加、堆积密度下降;入射角度对Ti薄膜微观结构的影响很小,且Ti薄膜以fcc结构为主.
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