通过霍尔效应测量、二次离子质谱等手段研究了n型硼-磷补偿直拉单晶硅的电子迁移率与掺杂浓度的关系.通过比较迁移率的实验测量值和由Klaassen迁移率模型得到的计算值,发现Klaassen模型适用于掺杂浓度在1018 cm-3数量级的补偿单晶硅电子迁移率的计算,但对掺杂浓度在1017cm-3数量级的补偿单晶硅而言则明显高估了电子迁移率.分析认为这是由于该模型未充分考虑低掺杂浓度情形下自由载流子对电离杂质的屏蔽作用由于杂质补偿受到的削弱效应.根据实验结果,修正了Klaassen模型,使之在低掺杂浓度的情况下获得的电子迁移率计算值也与实验值吻合得相当好.
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