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采用液相自组装法成功制备出铁酸铋(BiFeO3)薄膜,并采用XRD、SEM和VSM等测试方法对BiFeO3薄膜进行了表征.研究了功能化的自组装单分子层(SAMs)表面对BiFeO3薄膜成核和生长的影响,以及沉积温度对铁酸铋薄膜的形成和微观形貌的影响.结果表明:功能化的SAMs表面上薄膜与基底结合牢固,结构致密均一;沉积温度在60~70 ℃之间,薄膜表面比较平整均一,当沉积温度高于70 ℃,薄膜表面出现多晶聚集体现象.

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