溶胶-凝胶法制备LaNiO3薄膜及其电学性能研究

人工晶体学报, 2015, 44(6): 1582-1585.

溶胶-凝胶法制备LaNiO3薄膜及其电学性能研究

赵全亮 ^1, , 祁利辉 ^2, , 李中翔 ^3, , 何广平 ^4, , 狄杰建 ^5, , 王大伟 ^6,

1.北方工业大学机械与材料工程学院,北京,100144

2.北方工业大学机械与材料工程学院,北京,100144

3.北方工业大学机械与材料工程学院,北京,100144

4.北方工业大学机械与材料工程学院,北京,100144

5.北方工业大学机械与材料工程学院,北京,100144

6.北方工业大学机械与材料工程学院,北京,100144

基金项目: 北京市科技计划资助项目(KM201210009004,KM201410009001) 北京市自然科学基金(3122013) 国家自然科学基金(51305005,51375016,51402005)

关键词：镍酸镧 , 电学性能 , 溶胶-凝胶 , 铌锆钛酸铅

Fabrication and Electrical Properties of LaNiO3 Thin Films by Sol-Gel Method

Keywords： LaNiO3 , electrical property , sol-gel , PNZT

采用溶胶-凝胶法在SiO2/Si衬底上制备了LaNiO3薄膜,并通过改变退火温度和薄膜厚度对其微结构和电学性能进行了表征测试.X射线衍射(XRD)和电阻率测试结果表明,随着退火温度和厚度的增加,LaNiO3薄膜的结晶质量明显提高,薄膜电阻率也逐渐下降.当退火温度为800℃时,厚度为630 nm的LaNiO3薄膜电阻率最小,达到了1.37 mQ·cm.此外,利用LaNiO3薄膜作为下电极制备的2％ Nb-Pb(Zr06Ti0.4)O3薄膜呈良好的钙钛矿相结构,且经过1010铁电循环测试周期以后,2％ Nb-Pb(Zr06Ti0.4)O3薄膜的铁电性能未出现明显下降,表明该LaNiO3薄膜是生长PNZT铁电薄膜的优良下电极材料.

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