研究了W/Mo纳米多层膜的微结构及超硬效应.W/Mo纳米多层膜采用磁控溅射技术制备,并采用XRD、TEM和显微硬度计研究了薄膜的微结构和硬度.结果表明,W/Mo纳米多层膜形成多晶外延生长的超晶格结构;界面共格畸变使W,Mo两调制层的晶面间距随调制周期的减小而相互接近,在多层膜中形成交变应力场,从而使薄膜得到强化.
参考文献
| [1] | Yang W M C;Tsakalakos T;Hilliard J E .Enhanced Elastic Modulus in Composition- modulated Gold- nickel and Copper- palladium Foils[J].Journal of Applied Physics,1977,48(02):876-879. |
| [2] | Helmersson J;Todorova S;Barnett S A et al.Growth of Single- crystal TiN/VN Strained- lay Superlattices with Extremely High Mechanicals Hardness[J].Journal of Applied Physics,1987,62(02):841-844. |
| [3] | Shinn M;Hultman L;Barnett S A .Growth Structure,and Microstructure of Epitaxial TiN/VN Superlattices[J].Journal of Materials Research,1992,7(07):901-911. |
| [4] | Henein G E;Hilliard J E .Elastic Modulous in Composition- modulated Copper- nickel and Copper- gold Foils[J].Journal of Applied Physics,1983,54(02):728-733. |
| [5] | Warren E Pickett .Relationship between the Electrionic Structure of Coherent Composition Modulated Alloys and the Supermodulus Effects[J].Journal of Physics F:Metal Physics,1982,12:2195-2204. |
| [6] | Jankowski A F;Tsakalakos T .The Effect of Strain on the Elastic Constants of Noble Metals[J].Journal of Physics F:Metal Physics,1985,15:1279-1292. |
| [7] | Cammarata R C;Sieradzki K .Effects of Surface Stress on the Elastic Moduli of Thin Films and Superlattices[J].Physical Review Letters,1989,62:2005-2008. |
| [8] | Koehler J S .Attempt to Design a Strong Solid[J].Physical Review B,1970,2:547-551. |
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