通过求解声子辐射输运方程(EPRT)计算得到了薄膜的面向晶格热导率.在薄膜界面采用与声子波长相关的镜反射率模型,考虑了薄膜的厚度、温度和表面粗糙度等对其热导率的影响.结果表明,界面粗糙度对薄膜热导率的影响很大.减小界面粗糙度,会使得薄膜热导率大大增加.另外,薄膜厚度减小使得热导率峰值对应的温度增加.
The in-plane thermal conductivity of thin film is predicted by solving the equation of phonon radiative transfer (EPRT).The fraction of the specular phonon reflection on the interface in the model iS related to the phonon wavelength.The dependence of the thermal conductivity on the Si film thickness.temperature.and roughness is investigated.The results show that the interface roughness has an important effect on the thermal conductivity of the thin film.Decreasing the interface roughness makes the thermal conductivity larger.When the film becomes thinner.the temperature corresponding to the maximum thermal conductivity increases.
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