在ITO导电玻璃基底上,采用二氰二胺分散在DMF(N,N-二甲基甲酰胺)中形成的溶液做沉积液,阴极电化学沉积了CNx薄膜.X射线光电子能谱(XPS)和傅立叶转换红外光谱(FTIR)的分析结果表明,沉积的CNx薄膜的N/C比为0.7左右,碳和氮主要以C-N、C=N的形式成键,有少量的碳和氮以C≡N的形式成键.拉曼光谱测试发现其存在多个吸收峰,对其进行分析的结果表明薄膜样品中含有α-C3N4和β-C3N4相的成分.电阻率测试表明,氮化碳薄膜的电阻率值达到1012~1013Ω·cm.
参考文献
[1] | Cohen M L.Calculation of bulk moduli of diamond and zinc-blende solids[J].PHYSICAL REVIEW B,1985(32):7988-7991. |
[2] | Liu A Y;Cohen M L.Prediction of new low compressibility solids[J].SCIENCE,1989(245):841-842. |
[3] | Chuanbao Cao;Hesun Zhu;Hao Wang .Electrodeposition diamond-like carbon films from organic liquids[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(2):203-207. |
[4] | Wang H;Shen M R;Ning Z Y et al.Deposition of diamond-like carbon films by electrolysis of methanol solution[J].Applied Physics Letters,1996,69(08):1074-1078. |
[5] | Cao CB.;Fu JY.;Zhu HS. .Carbon nitride thin films deposited by cathodic electrodeposition[J].International Journal of Modern Physics, B. Condensed Matter Physics, Statistical Physics, Applied Physics,2002(6/7):1138-1142. |
[6] | Fu Q.;Cai K.;Wang H.;Cao CB.;Zhu HS.;Jiu JT. .Attempt to deposit carbon nitride films by electrodeposition from an organic liquid[J].Physical Review.B.Condensed Matter,1999(3):1693-1696. |
[7] | Marton D;Boyd K J;Al-Bayati A H.Carbon nitride deposited using energetic species:a two-phase system[J].PHYSICAL REVIEW LETTERS,1994(73):118-120. |
[8] | Chuan-Bao Cao;Qiang Lv;He-Sun Zhu .Carbon nitride prepared by solvothermal method[J].Diamond and Related Materials,2003(3/7):1070-1074. |
[9] | J. Zemek;M. Jelinek;V. Vorlicek;M. Trchova;J. Lancok .Carbon nitride layers created by laser deposition combined with RF discharge[J].Diamond and Related Materials,2000(3-6):548-551. |
[10] | Meng XQ.;Guo HX.;Li AG.;Fan XJ.;Zhang ZH. .Arc discharge synthesizing of carbon nitride[J].Solid State Communications,1998(2):75-78. |
[11] | Wixom M R.Chemical preparation and shock wave compression of carbon nitride precursors[J].Journal of the American Ceramic Society,1990(73):1973-1978. |
[12] | Yen T Y;Chou C P .Growth and characterization of carbon nitride thin films prepared by arc-plasma jet chemical vapor deposition[J].Applied Physics Letters,1995(67):2801-2803. |
[13] | Y. P. Zhang;Y. S. Gu;X. R. Chang;Z. Z. Tian;D. X. Shi;X. F. Zhang;L. Yuan .Characterization of carbon nitride thin films deposited by microwave plasma chemical vapor deposition[J].Surface & Coatings Technology,2000(2/3):260-265. |
[14] | Werninghaus T;Zahn D R T;Wang E G.Micro-Raman spectroscopy investigation of C3N4 crystals deposited on nickel substrates[J].Diamond and Related Materials,1998(07):52-56. |
[15] | Zhao X A;OngC W;TsangY C et al.Reactive pulsed laser deposition of CNx films[J].Applied Physics Letters,1995(66):2652-2654. |
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