NiFeCr/NiFe/Ta films with excellent performance were prepared by magnetron sputtering system.The anisotropic magetoresistance (AMR) value (△R/R) and magnetic filed sensitivity (Sv,Sv=[d(△R/R)/dH]max.) for the 12 nm NiFe film deposited on NiFeCr buffer layer were 3.66％ and 1.42 × 10-4 ％T-1,respectively.The higher Sv of the film is close to that of a spin valve (SV).The microstructure analysis shows that the NiFeCr buffer layer has adopted the same structure with the same interplanar distance as the NiFe layer,inducing a strong NiFe (111) texture,and that the NiFeCr/NiFe interface is quite smooth,leading to a high degree of specular reflection of conduction electrons.Both increase the △R and reduce the R in the film,which lead to the high △R/R.Clean substrate surfaces are critical for preparation of high performance NiFeCr/NiFe/Ta films,and sputter cleaning or pre-deposition of 5 nm amorphous A12O3 layer in the deposition chamber can provide the required clean substrate surfaces for the growth of the buffer layer.
参考文献
| [1] | Vcelak J;Ripka P;Kubik J;Platil A;Kaspar P .AMR navigation systems and methods of their calibration[J].Sensors and Actuators, A. Physical,2005(0):122-128. |
| [2] | Kang MH;Choi BW;Koh KC;Lee JH;Park GT .Experimental study of a vehicle detector with an AMR sensor[J].Sensors and Actuators, A. Physical,2005(2):278-284. |
| [3] | Adelerhof DJ.;Geven W. .New position detectors based on AMR sensors[J].Sensors and Actuators, A. Physical,2000(1/3):48-53. |
| [4] | Mlejnek P;Vopalensky M;Ripka P .AMR current measurement device[J].Sensors and Actuators, A. Physical,2008(2):649-653. |
| [5] | Fitzsimmons MR;Silva TJ;Crawford TM .Surface oxidation of Permalloy thin films[J].Physical review, B. Condensed matter and materials physics,2006(1):4420-1-4420-7-0. |
| [6] | Amos N;Fernandez R;Ikkawi R;Lee B;Lavrenov A;Krichevsky A;Litvinov D;Khizroev S .Magnetic force microscopy study of magnetic stripe domains in sputter deposited Permalloy thin films[J].Journal of Applied Physics,2008(7 Pt.3):E7732-1-E7732-3-0. |
| [7] | Guo ZB;Wu YH;Qiu JJ;Zong BY;Han GC .Exchange bias and magnetotransport properties in IrMn/NiFe/FeMn structures[J].Physical review, B. Condensed matter and materials physics,2008(18):184413-1-184413-6-0. |
| [8] | Lee WY.;Tameerug P.;Allen E.;Mauri D.;Toney MF. .High magnetoresistance permalloy films deposited on a thin NiFeCr or NiCr underlayer[J].Journal of Applied Physics,2000(9 Pt.3):6992-6994. |
| [9] | W. Y. Lee;M. F. Toney;D. Mauri .High Magnetoresistance in Sputtered Permalloy Thin Films Through Growth on Seed Layers of (Ni_(0.81)Fe_(0.19))_(1-x)Cr_(x)[J].IEEE Transactions on Magnetics,2000(1):381-385. |
| [10] | Lin T;Mauri D .Effects of oxide seed and cap layers on magnetic properties of a synthetic spin valve[J].Applied Physics Letters,2001,78(15):2181. |
| [11] | Seed layer characterization for PtMn bottom spin-filter spin valves[J].Journal of Applied Physics,2003(10):8406-8408. |
| [12] | Tsann Lin;Daniele Mauri;Brian York;Philip M. Rice .Crystalline reconstruction in Ni-Cr-Fe/Ni-Fe films[J].Applied physics letters,2004(3):386-388. |
| [13] | Min Zhou;Lifan Chen;Zhitao Diao;Chang-Man Park;Yiming Huai .Structural characterization of nano-oxide layers in PtMn based specular spin valves[J].Journal of Applied Physics,2005(10):10N706-1-10N706-3-0. |
| [14] | An YK;Liu JW;Ma YC .Influence of (Ni81Fe19)(100-x)Cr-x seed layer on structure and magnetic properties of NiFe/PtMn bilayers[J].Journal of Applied Physics,2008(1):13905-1-13905-5-0. |
| [15] | Lei Ding;Jiao Teng;Qian Zhan;Chun Feng;Ming-hua Li;Gang Han;Li-jin Wang;Guang-hua Yu;Shu-yun Wang .Enhancement of the magnetic field sensitivity in Al_(2)O_(3) encapsulated NiFe films with anisotropic magnetoresistance[J].Applied physics letters,2009(16):162506-1-162506-3. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%