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Co doped ZnO nanowires with different Co contents have been fabricated by a chemical vapor deposition method. X-ray diffraction results show that all the samples are of single phase and crystallize in wurtzite ZnO structure. The lattice parameter a increases with increasing Co content, while the parameter c has no obvious change with increasing Co. Raman spectra show that the nonpolar E2(High) mode becomes broad and weak with the doping of Co, which indicates that the incorporation of Co causes structural disorder in the crystalline columnar ZnO lattice. The photoluminescence spectra exhibit that the position of the ultraviolet emission shifts to short wavelength and the intensity decreases with increasing Co. The green emission is affected by
two contrary factors. It is increased by the introduced defects, but suppressed by the interaction between Co doping and native defects and the later affects it more significantly.

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