采用磁控溅射法制备了TbDyFe超磁致伸缩非晶薄膜,研究了真空热处理退火及软磁性Fe薄膜的交换耦合作用对TbDyFe超磁致伸缩的低场磁致伸缩性能的影响.研究结果表明:真空退火处理通过改善薄膜的微结构及应力状态,有效地提高薄膜了的低场磁敏性能;易磁化方向平行于膜面的软磁Fe膜的复合,使薄膜平行于膜面的易磁化性能大大提高,复合薄膜的强制磁致伸缩系数(dλ/dH)提高3倍以上.单层薄膜厚度越小,交换作用越强,低场磁致伸缩性能越好;当薄膜厚度大于交互作用距离、薄膜的总厚度不变时,单层薄膜的厚度变化对复合薄膜的磁致伸缩性能没有影响.
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