采用MEVVA离子源复合磁控溅射沉积系统,在钛合金Ti6Al4V基体上制备Ti掺杂DLC薄膜,研究Ti掺杂对DLC薄膜疏水性能的影响.通过X射线能谱仪(EDS)、X射线光电子谱(XPS)、原子力显微镜(AFM)分别对薄膜的组分、化学键以及表面形貌进行分析;通过测量静态接触角分析薄膜的润湿性并计算薄膜的表面能.结果表明:Ti掺杂DLC膜明显提高疏水性能,水接触角最高达到105°.薄膜中sp2C杂化键组分增加以及表面形成Ti-O键,是导致薄膜表面能降低的重要因素.
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