金属狭缝阵列透镜是一种通过激发和操控表面等离子体激元,突破衍射极限,实现光束调控的纳米光子器件.如何快速、高效地设计具有一定功能的金属狭缝阵列,并且在不影响器件功能的前提下,增大狭缝尺寸,使器件便于加工,是该类器件走向实际应用的关键问题.本文提出一种可以实现光束调控的新的金属狭缝阵列透镜的设计方法,将金属狭缝阵列作成几何曲面结构,可快速、高效地设计透镜,实现光束的调控作用.该方法设计的透镜,金属狭缝尺寸在80 nm,便于设计之后的加工制备,将加速纳米光子器件的实用化.
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