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本文采用射频磁控溅射技术在钛合金(Ti6Al4V)基体上制备出含氟羟基磷灰石(FHA)生物涂层,探讨该涂层组织结构,不同氟含量和温度对涂层晶化程度的影响.利用扫描电镜(SEM)观察FHA生物涂层的表面形貌,采用X射线衍射仪(XRD)分析涂层相结构,利用能量分散谱仪(EDS)分析涂层的Ca/P比.结果表明,随着氟含量的增加可大大提高涂层的晶化程度,制备的FHA涂层致密、均匀.700℃晶化处理的涂层结晶度较高.

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