基片温度对TiO2薄膜表面形貌和性能的影响

材料科学与工程学报, 2006, 24(3): 382-385. doi: 10.3969/j.issn.1673-2812.2006.03.015

基片温度对TiO2薄膜表面形貌和性能的影响

黄永刚 ^1, , 陈敏 ^2, , 李长敏 ^3, , 张庆瑜 ^4, , 黄英 ^5,

1.中国建筑材料科学研究院特种玻璃纤维与光电功能材料研究所,北京,100024;大连轻工业学院材料科学与工程系,辽宁,大连,116034

2.大连轻工业学院材料科学与工程系,辽宁,大连,116034

3.大连轻工业学院材料科学与工程系,辽宁,大连,116034

4.大连理工大学三束材料改性国家重点实验室及物理系,辽宁,大连,116024

5.中国建筑材料科学研究院特种玻璃纤维与光电功能材料研究所,北京,100024

基金项目: 国家重点实验室基金(50240420656)

关键词： TiO2薄膜 , 基片温度 , 原子力显微镜 , 表面形貌 , 表面性能

Influence of Substrate Temperature on Surface Morphology and Properties of Titanium Oxide Thin Films

利用射频磁控溅射设备在玻璃基片上制备TiO2薄膜,采用AFM、UV-Vis分光光度、接触角测定仪等测试手段,研究基片温度对薄膜表面形貌、粗糙度和表面性能的影响.结果表明,随着基片温度增加,薄膜表面粗糙度增大,薄膜中颗粒由无定形态逐渐向定向排列的晶态转变,而薄膜结构、表面形貌和粗糙度的变化明显影响薄膜表面性能.最后,探讨了薄膜的生长机理.

参考文献

[1]	D Dumitriu;A R Bally et al.Photo catalytic degradation of phenol by TiO2 thin films prepared by sputtering[J].Applied Catalysis B:Environmental,2000,25(01):75-80.
[2]	Kayano Sunada;Yoshihilo Kikuchi;Kazuhito Hashimoto;Akira Fujishima .Bactericidal and detoxification effects of TiO2 thin film photocatalysts[J].Environmental Science & Technology: ES&T,1998(5):726-728.
[3]	A J William;C M Pin .Mineralization of bacterial cell mass on photocatalytic surface in air[J].Environmental Science and Technology,1998,32(05):2650-2653.
[4]	Jiaguo Yu;Xiujian Zhao et al.Photo catalytic activity of nanometer TiO2 thin films prepared by the sol-gel methods[J].Materials Chemistry and Physics,2001,69:25-29.
[5]	Feng Zhang;Zhihong Zheng et al.Synthesis of titanium dioxide films by ion beam enhanced deposited[J].Nuclear Instruments and Methods in Physics Research B:Beam Interaction with Materials and Atoms,1997,132:620-626.
[6]	V. Vancoppenolle;P. -Y. Jouan;M. Wautelet;J. -P. Dauchot;M. Hecq .D.c. magnetron sputtering deposition of TiO{sub}2 films in argon-oxygen gas mixtures: theory and experiments[J].Surface & Coatings Technology,1999(0):933-937.
[7]	G Binnig;C F Quate et al.Atomic Force Microscope[J].Physical Review Letters,1986,56(09):930-933.
[8]	赵坤,朱凤,王莉芳,孟铁军,张保澄,赵夔.反应溅射法制备TiO2薄膜[J].物理学报,2001(07):1390-1395.
[9]	S Ben Amor;L Guerri et al.Influence of the temperature on the properties of sputtered titanium oxide films[J].Materials Chemistry and Physics,2002,77:903-911.
[10]	Martin N.;Rondot D.;Palmino F.;Mercier R.;Rousselot C. .MICROSTRUCTURE MODIFICATION OF AMORPHOUS TITANIUM OXIDE THIN FILMS DURING ANNEALING TREATMENT[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(1/2):113-121.
[11]	高濂;郑珊.纳米氧化钛光催化材料及应用[M].北京:化学工业出版社,2002:32.
[12]	Wenjie ZHANG,Ying LI,Fuhui WANG.Properties of TiO2 Thin Films Prepared by Magnetron Sputtering[J].材料科学技术学报(英文版),2002(02):101-107.
[13]	吴自勤;王兵.薄膜生长[M].北京:科学出版社,2001:141-168.

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基片温度对TiO2薄膜表面形貌和性能的影响

Influence of Substrate Temperature on Surface Morphology and Properties of Titanium Oxide Thin Films

参考文献