本文研究用平头压痕试验确定薄膜-基体材料中薄膜材料弹塑性参数的可行性,重点研究了薄膜材料的屈服强度和硬化模量的确定方法.利用有限元(FEM)进行了模拟计算,给出了平头压痕下典型的等应力分布,以及载荷-压入深度的曲线.通过对载荷-压入深度曲线的研究,给出了通过平头压痕试验确定薄膜屈服强度和薄膜硬化模量的方法.
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