用苯(C6H6)和四氟甲烷(CF4)混合气体作源气体,用微波电子回旋共振等离子体化学气相沉积技术制备了含氟非晶碳膜(a-C:F).着重讨论了输入的微波功率对成膜结构和性质的影响.我们对沉积的膜作了膜厚、扫描电子显微表面形貌(SEM)、紫外-可见光透射谱(UV-VIS)、傅立叶红外变换(FTIR)等的测量.结果表明随着微波功率的增加沉积速率一直在上升;同时膜中缺陷增多;从FIIR的结果我们发现膜中主要以C-F、CF2和F-芳基成键;通过UV-VIS吸收谱的测量的结果我们求出了折射率和光学带隙;并且将光学带隙和膜中的sp2碳浓度建立关系.
参考文献
| [1] | Haruo Yokomichi;Tohru Hayashi;Tomihiro Amano;Atsushi Masuda .Tomihiro Amano, Atsushi Masuda[J].Journal of Non-Crystalline Solids,1998,641:227-230. |
| [2] | Scott J;Limb;Catherine B;Lablle Karen K Gleason, David J. Edell, and Edward F .[J].Applied Physics Letters,1996,68(20):2810. |
| [3] | Kazuhiko Endo and Toru Tatsumi Jpr[J].Journal of Applied Physics,1997,36(11):1531. |
| [4] | 叶超.轴向二极场MWECR-CVD系统等离子体特性的实验研究[J].核聚变与等离子体物理,1995(04):43. |
| [5] | L. G. Jacobsohn;D. F. Franceschini;M. E. H. Maia da Costa;F. L. Freire Jr. .Structural and mechanical characterization of fluorinated amorphous-carbon films deposited by plasma decomposition of CF{sub}4-CH{sub}4 gas mixtures[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,2000(5):2230-2238. |
| [6] | 蒋先明;何伟平.简明红外识谱法[M].桂林:广西师范大学出版社,1992 |
| [7] | Scott J;Limb;Karen K .[J].Journal of Vacuum Science and Technology,1997,A15(04):1814. |
| [8] | Jeong W Yi;Yung H Lee;Bakhtier Facrouk .Bakhtier Facrouk[J].Thin Solid Films,2000,374:103. |
| [9] | Steven F;Durrant;Sandra G;C Castro Luz Elena Bolivar-Marinez, Douglas S. Galvao, Mario A. Bica De Moraes, .[J].THIN SOLID FILMS,1997,304:149. |
| [10] | X. Wang;H. R. Harris;K. Bouldin .Structural properties of fluorinated amorphous carbon films[J].Journal of Applied Physics,2000(1):621-623. |
| [11] | 史月艳;潘文辉;殷志强 .[J].真空科学与技术,1994,14(01):5. |
| [12] | 陈治明;王建农.半导体器件的材料物理学基础[M].北京:科学出版社,1999 |
| [13] | 何宇亮;陈光华;张仿清.非晶态半导体物理学[M].北京:高等教育出版社,1989 |
| [14] | 刘东平,李芳,俞世吉,马腾才.非晶碳氢薄膜结构及光学间隙[J].材料科学与工艺,2000(02):58-61. |
| [15] | By J Robettson .[J].PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANIC,1997,76(03):335. |
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