采用反应磁控溅射技术在取向硅钢片表面制备了氮化硅(Si3N4)张力涂层.通过实验研究反应磁控溅射时间、高温退火温度和实验气氛对硅钢铁损以及涂层附着性的影响.研究表明,反应磁控溅射技术在硅钢表面溅射氮化硅张力涂层可有效的降低硅钢的铁损,且各种工艺条件对硅钢的铁损和涂层的附着性影响很大.在氮气和氩气气氛中,经过5min反应磁控溅射氮化硅,然后在氢气和氮气的气氛中,820℃下进行高温退火时,取向硅钢的铁损可降低18%.
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