网状阴极法在碳钢表面沉积氮化钽薄膜的研究

材料热处理学报, 2002, 23(2): 58-61. doi: 10.3969/j.issn.1009-6264.2002.02.014

网状阴极法在碳钢表面沉积氮化钽薄膜的研究

窦瑞芬 ^1, , 田林海 ^2, , 潘俊德 ^3, , 陈飞 ^4, , 赵晋香 ^5,

1.太原理工大学表面工程研究所,山西太原,030024

2.太原理工大学表面工程研究所,山西太原,030024；西安交通大学材料工程学院,陕西西安710074

3.太原理工大学表面工程研究所,山西太原,030024

4.太原理工大学表面工程研究所,山西太原,030024

5.太原理工大学表面工程研究所,山西太原,030024

基金项目: 山西省青年基金(991020)

关键词：网状阴极溅射 , 空心阴极效应 , 氮化钽薄膜

Study of TaN Film Synthesized in Carbon Steel Substrate by the Net-Shape Cathode Sputtering Method

介绍了一种在钢铁基体上制备氮化钽薄膜的新方法--网状阴极法.其设备简单、价格低廉.实验中发现,在工艺参数调配合适的条件下,可制备出结构为面心立方和密排六方结构的氮化钽薄膜.薄膜较致密且均匀,与基体结合良好.分析了优选工艺参数条件下合成的氮化钽膜的成分、组织、表面和断口形貌及结合力.

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材料期刊网

网状阴极法在碳钢表面沉积氮化钽薄膜的研究

Study of TaN Film Synthesized in Carbon Steel Substrate by the Net-Shape Cathode Sputtering Method

参考文献