介绍了金刚石优异的光学和力学特性,对金刚石薄膜在从紫外到红外波段以及不同脉宽激光参数下的激光损伤行为和损伤阈值进行了评述.分析了不同激光工作参数对金刚石薄膜的激光损伤机理,认为石墨化导致晶格失稳是金刚石薄膜激光损伤的主要原因.金刚石薄膜石墨化有两种方式:垂直表面向体层方向石墨化和平行表面按分层的方式逐层石墨化.
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