在气体配比HCl:Xe:He=0.12%:1%:98.88%实现了大功率短脉冲XeCl准分子激光器,以纳米异质结构、微观量子阱、表面微小尺度薄膜沉积,镀制金刚石薄膜、半导体薄膜、巨磁薄膜,及外延生长及后续的光刻、激光与物质的相互作用、等离子体研究为目的,设计了高能量、短脉宽脉冲放电激励的XeCl准分子激光器新型结构,完成了脉冲波形测试.试验结果表明:激光脉宽最短13 ns,单脉冲能量450 mJ,矩形光斑大小2 cm×1 cm,束散角3 mrad,最高重复频率5 Hz.验证了激光器结构、动力学速率方程、总结出了饱和增益、脉宽规律.产生的短脉宽激光热融蚀效应小,类金钢石材料对基底形成了良好的等离子溅射羽辉.
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