随着集成电路的不断发展,电路中互连线规模越来越大,尺寸越来越小,需要承受的电流密度越来越大.在这种趋势下,传统的铜互连线的有效性和可靠性都随之变差.由于碳纳米管具有良好的电学,热学和机械性能,使其成为目前研究较热的互连材料之一.本文概述了碳纳米管用于集成电路互连的优势,碳纳米管互连的电路模型,碳纳米管互连面临的挑战及其最新的研究进展,并展望了碳纳米管作为集成互连的研究前景.
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