介绍了一种适用于微流体系统的电磁驱动无阀微泵.该微泵的泵腔以及扩散口和喷口都采用微机电系统(MEMS)技术进行制备,利用扁平振动马达作为驱动部件,以弹性模量较小的聚二甲基硅氧烷(PDMS)作为振动膜,研制出一个尺寸为12mm×12mm×5mm的微泵.对微泵的振动频率和输出流量进行了测试,结果显示:电压对频率和流量均有显著影响.当电压为1.5V时,微泵的流量达到最大值158μL/min.
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