采用离子束辅助真空电弧沉积技术在玻璃衬底上制备了氮掺杂的TiO2薄膜样品,通过X射线衍射(XRD)、XPS以及UV-Vis分光光度计等测试手段对离子束辅助沉积样品的结构、表面成分及抗菌活性进行了分析,研究了经离子束辅助沉积氮掺杂的TiO2薄膜的抗菌性能.结果表明:离子束辅助沉积的氮掺杂的TiO2薄膜为非晶态结构,热处理后向锐钛矿转变,出现(101)面的择优取向.离子束流越大,TiO2-xNx薄膜红移的越少;抗菌活性随着离子束流的增加而减弱,但离子束辅助沉积的掺氮TiO2薄膜抗菌活性均比传统真空电弧沉积的薄膜抗菌活性高.离子束辅助沉积的掺氮TiO2薄膜对大肠杆菌、金黄色葡萄球菌自然光照的抑菌率的抗菌率均可达99.9%以上.
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