设计了一种新型的共平面微结构气体传感器,利用MEMS技术制作了传感器样品.实验测得该传感器对于体积分数为50×10~(-6)CO气体的灵敏度为8.6(R0/R),功耗为82mW,响应时间约5s,恢复时间约22s,该传感器的灵敏度是同种敏感材料烧结型传感器(测体积分数50×10~(-6) CO气体)的2.5倍,而功耗却是同种敏感材料烧结型传感器的1/2,是一种具备了体积小、重量轻、功耗低、灵敏度高、便于与其它器件集成等特点,而且制作工艺简单,成本较低的微结构CO气体传感器.
A novel micro-structure co-plane gas sensor was designed.And a sample of sensor was fabricated by MEMS technology.The tests show the sensitivity was 8.6 for 50×10~(-6) CO gas concentration,the power consumption is 82mW,response time is about 5 s,and recuperate time is more or less 22s.Whereas for the conventionality sintered type sensor made by the same sensitive materials,the sensitivity of new type sensor is 2.5 times higher than the conventionality type sensor,and the power consumption is just the half.The new type of micro-structure CO gas sensor possess the advantages of small volume,lightness,low power consumption,high sensitivity,and convenience for assembling.
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