本文的目的在于优化甲醛气体传感器.微型甲醛气体传感器设计是以石英玻璃当作基材,白金(Pt)被当作微型加热器电阻来加热感测层,并以氧化镍(NiO)薄膜作为感测层.当环境内有甲醛气体存在时,NiO薄膜层上导电度会增加,因而导致感测层电阻值降低.此微传感器,膜厚为0.34μm,在300℃反应时间只需6秒,灵敏度可达13.5 kΩ/ppb,最低侦测限度可以量测到40 ppb. 而本研究中针对不同的甲醛气体浓度,分别添加金当其催化剂、玻璃基材上共溅镀氧化镍与氧化铝、并比较有无指叉电极、改变基材温度…等,以提升其氧化镍薄膜感测性能.
参考文献
| [1] | Hempel A J;Kjaergaard K S;Molhave L et al.Sensory eyeirritation in humans exposed to mixture of volatile organ-ic compounds[J].Archives of Environmental and Occupational Health,1999,54(03):416-424. |
| [2] | Kawamura K;Kerman K;Fujihara M;Nagatani N;Hashiba T;Tamiya E .Development of a novel hand-held formaldehyde gas sensor for the rapid detection of sick building syndrome[J].Sensors and Actuators, B. Chemical,2005(2):495-501. |
| [3] | R.Kataky;M.R.Bryce;L.Goldenberg;S.Hayes;A.Nowak .A biosensor for monitoring formaldehyde using a new lipophilic tetrathiafulvalent-tetracyanoquinodimethane salt and a polyurethane membrane[J].Talanta: The International Journal of Pure and Applied Analytical Chemistry,2002(3):451-458. |
| [4] | Dirksen JA.;Ring TA.;Duval K. .NiO thin-film formaldehyde gas sensor[J].Sensors and Actuators, B. Chemical,2001(2):106-115. |
| [5] | Mine Y;Melander N;Richter D et al.Detection of formal-dehyde using mid-infrared difference frequency generation[J].Applied Physics B:Lasers and Optics,1997,65(02):771-774. |
| [6] | Lee C Y;Fu L M;Chiang C M et al.MEMS-based formaldehyde gas sensor integrated with a micro-hotplate[J].Microsystem Technologies,2005,12(10-11):893-898. |
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