超短脉冲激光烧蚀熔融硅的理论模型

1.东南大学机械工程学院,南京,211189

2.东南大学机械工程学院,南京,211189

3.东南大学机械工程学院,南京,211189;东南大学MEMS教育部重点实验室,南京,210096

基金项目: 江苏省自然科学基金(BK2002060) 国家自然科学基金(50275026)

Theoretical model investigation about the mechanism of ultrashort -pulse laser ablation fused silica

在Fokker_P1anck方程的基础上,对超短脉冲激光烧蚀熔融硅的机理进行分析研究,建立了雪崩电离、多光子吸收电离导致的熔融硅烧蚀机理的数学模型.其计算得出的激光能量密度和临界烧蚀阀值与实验结果很好的吻合,定量解释了超短脉冲激光对熔融硅烧蚀损伤微观过程的影响.

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