应用中频反应磁控溅射设备在载玻片上制备掺铈的Al2:O3薄膜,在固定的电源功率下,氩气流量为23sccm,氧流量为5sccm,室温下溅射时间为90min的条件下,通过控制薄膜中的Ce3+离子的掺杂量来改变薄膜的发光性能.通过X光能量散射谱(EDS)和光致发光测量,得到发光强度和发光峰位对薄膜中的Ce3+浓度有强烈的依赖关系,并且分析了产生这种关系的原因;对发光激发谱分析表明,薄膜发光是源于薄膜中形成的氯化铈集合体中的Ce3+.Al2O3:Ce3+发光膜可应用于需要蓝光发射的平板显示领域.
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