薄膜技术在现代科技领域中有着广泛的应用.人们对薄膜的生长过程通过理论和实验进行了深入的研究,其中计算机模拟是重要的方法.本文概述了对薄膜生长过程的实验观察结果及其理论分析,主要讨论了薄膜生长的计算机模拟中经常采用的方法-蒙特卡罗法和分子动力学方法、描述衬底上成膜粒子运动的一些模型以及在计算机模拟中需注意的一些问题,其中主要包括粒子间的相互作用、入射粒子的能量和粒子在衬底上的扩散运动.
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