采用气态源分子束外延方法及应变补偿生长工艺生长了InAsP/InGaAsP应变补偿多量子阱激光器材料,采用选择刻蚀和聚酰亚胺隔离工艺制作成了脊波导型1.3μm激光器芯片并对芯片性能进行了统计测量,测量结果表明此种激光器芯片在室温下的阈值电流可小于10mA,在25oC至90oC温度范围内特征温度大于90K,并表现出较好的单纵模特性.
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