采用金属有机化学气相沉积方法,在不同氧气分压下,对硅衬底氧化锌薄膜材料生长做了研究.X-射线衍射方法对氧化锌薄膜的结晶质量做了比对测试.测试结果表明薄膜是沿着(002)方向生长.利用光荧光谱测试分析,对薄膜的发光特性做了研究,研究发现随着氧气分压增大,薄膜的紫外发光峰增强.通过原子力显微镜测试,对薄膜的表面形貌做了观察,发现结晶颗粒的平均粗糙度、均方根,以及平均直径随着氧气分压的增大呈现逐渐变小的趋势.
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