使用脉冲激光沉积技术制备了系列无氢类金刚石薄膜,测量了样品的Raman光谱、光吸收光谱和光致发光光谱,研究了薄膜结构和光致发光性质与制备条件的依赖关系.结果表明,这种薄膜是由少量sp2键和大量sp3键组成的非晶碳膜.薄膜的光学带隙在1.68～2.46 eV,发光在可见光区呈宽带结构.生长温度能够对类金刚石薄膜的结构和发光性质产生较大影响.当生长温度从室温升高至400 ℃时,sp2团簇的变大使C原子的有序度增强,从而导致薄膜的光学带隙变窄,发光峰红移且半高宽变小.
参考文献
| [1] | Ryu J T,Honda S I,Katayama M,et al.Field electron emission from amorphous carbon thin films grown by RF magnetron sputtering[J].Current Applied Physics,2005,5(4):387-391. |
| [2] | 马会中,张兰,张俊杰,等.类石墨薄膜的场致电子发射研究[J].液晶与显示,2005,19(4):244-248. |
| [3] | Roertson J.Photoluminescence mechanism in amorphous hydrogenated carbon[J].Diamond and Related Material,1996,5(3-5):457-460. |
| [4] | Li Qingshan,Fang Rongchuan,Ma Yurong.Optical absorption and photoluminescence of unhydrogenated amorphous carbon films[J].Thin Solid Films,1993,226(1):99-103. |
| [5] | Henley S J,Carey J D,Silva S R P.Room temperature photoluminescence from nonstructural amorphous carbon[J].Applied Physics Letter,2004,85(25):6236-6238. |
| [6] | Karpman J,Riabkina-Fishman M,Jzahavi D,et al.Properties of unhydrogenated diamond-like carbon-films deposited by ArF excimer-laser[J].Diamond and Related Material,1994,4(1):10-14. |
| [7] | Ferrari A C,Robertson J.Resonant Raman spectroscopy of disordered,amorphous,and diamond like carbon[J].Physics Review B,2000,61(7):14095-14098. |
| [8] | Schwan J,Ulrich S,Roth H,et al.Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating[J].J.Appl.Phys.,1996,79(3):1416-1422. |
| [9] | Fuge G M,May P W,Rosser K N,et al.Laser Raman and X-ray photoelectron spectroscopy of phosphorus containing diamond-like carbon films grown by pulsed laser ablation methods[J].Diamond and Related Materials,2004,13(4-8):1442-1448. |
| [10] | Lifshitz Y.Hydrogen-free amorphous carbon films:Correlation between growth conditions and properties[J].Diamond and Related Material,1996,5(4):388-394. |
| [11] | Sattel S,Robertson J,Ehrhardt H.Effects of deposition temperature on the properties of hydrogenated tetrahedral amorphous carbon[J].J.Appl.Phys.,1997,82(9):4566-4576. |
| [12] | Koivusaari K J,Levoska J,Leppavuori S.Pulsed-laser deposition of diamond-like carbon:Relations between laser fluence,velocity of carbon ions,and bonding in the films[J].J.Appl.Phys.,1999,85(5):2915-2920. |
| [13] | Heitz T,Godet C,Bouree J E,et al.Radiative and nonradiative recombination in polymelike a-C∶H films[J].Phys.Review B,1999,60(8):6045-6052. |
| [14] | Liao Meiyong,Feng Zhihong,Chai Chunlin.Violet blue emission from hydrogenated amorphous carbon films deposited from energetic CH3 ions and ion bombardment[J].J.Appl.Phys.,2002,91(4):1891-1897. |
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