超纳米金刚石(UNCD)是一种全新的纳米材料,具有许多独特性能.介绍了Si微尖和微尖阵列阴极沉积超纳米金刚石薄膜的工艺及其场发射特性.研究发现,适当的成核工艺和微波等离子体化学气相沉积工艺可在Si微尖上沉积一层光滑敷形的金刚石薄膜;沉积后阴极的电压-电流特性、发射电流的稳定性以及工作在氧气环境下的发射特性都获得明显提高.讨论了超纳米晶金刚石薄膜阴极的发射机理.
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