氧化锌材料是新一代宽禁带光电子半导体材料和场致发射材料,通过等离子体分子束外延设备,在a-plane的蓝宝石衬底上生长了高质量的氧化锌外延材料.在生长过程中用反射高能电子束衍射仪(RHEED),研究了生长时材料薄膜的表面形貌.为了使材料更好地应用于器件,研究了材料的掺杂性质.研究了给体束缚激子(Donor bound exciton (DX))、自由激子(Free exciton(EX))和受体束缚激子 (Acceptor bound exciton (AX))随温度变化的发光过程.用紫外-可见透射光谱研究了ZnO薄膜材料的透射光谱性质.结果表明,用分子束外延生长设备成功地生长了高质量的氧化锌薄膜材料.
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