利用XPS分析了TCA钛合金经阳极氧化处理后,表面氧化膜的成分和结构及其随深度的变化.研究表明,钛合金阳极氧化膜表面为单一的TiO_2,并以晶态和非晶态的形式存在于氧化膜中.随着氧化膜厚度的增加,内部氧化越来越不充分,TiO_2的含量减少,并逐渐出现Ti:O_3、TiO;并且阳极氧化处理明显增厚了表面氧化膜.
Surface elements and valence state of the anodic oxide films on Ti6Al4V (TC4) alloy were investigated by X - ray photoelectron spectroscopy (XPS). The results show that the surface of the oxide films of TC4 alloy is uniform TiO_2, and it exists in oxide films in crystal or non-crystal state. As the thickness of the oxide films is increasing,the oxidation inside and the TiO_2 content become less and less,Ti_2O_3 and TiO appear gradmally and the thickness of surface oxide film after anodic oxidation is evidently increased.
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