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综述了近年来低维材料热导率测试方法的研究发展状况,介绍了几种典型测试方法,并对低维材料热导率测试结构的应用和未来发展进行了展望.

参考文献

[1] Meconnel A;Uma S;Goodson K .Thermal conductivity of doped polysilieon layers[J].Journal of Microelectromechanical Systems,2001,10(03)
[2] Boudenne A;Ibes L;Gehin E et al.A simultaneous characterization of thermal conductivity and diffusivity of polymer materials by a periodic method[J].Journal of Physics D:Applied Physics,2004,37:132-139.
[3] 宋青林,夏善红,陈绍凤,吕耀.薄膜热导率测量结构的研究[J].仪器仪表学报,2004(z1):228-229.
[4] 宋青林,夏善红,陈绍凤,张建刚.微尺度薄膜热导率测试技术[J].物理学进展,2002(03):283-295.
[5] 张立伟,马灵芝,唐祯安,蒋国平.一种用于测量SiO2薄膜热导率的测试方法[J].测控技术,2001(08):25-27.
[6] Dachen C;Goodson K;Babin S et al.Thermal conductivity measurements of thin-film resist[J].Journal of Vacuum Science and Technology B:Microelectronics and Nanometer Structures,2001,19(06):2874-2877.
[7] 顾毓沁,晋宏师,孙晓毅,陈皓明,谢志刚.用扫描热显微镜测量微小区域热导性质的探讨[J].工程热物理学报,2000(04):456-460.
[8] 崔景彪,方容川.热厚衬底上薄膜材料热导率测量[J].科学通报,1996(03):280-282.
[9] 缪正宇,张青川,陈大鹏,伍小平,李超波,郭哲颖,董凤良,熊志铭.双材料微梁阵列室温物体红外成像[J].物理学报,2006(07):3208-3214.
[10] Bartosz M. Zawilski;Roy T. Littleton Iv;Terry M. Tritt .Description of the parallel thermal conductance technique for the measurement of the thermal conductivity of small diameter samples[J].Review of Scientific Instruments,2001(3):1770-1774.
[11] B. M. Zawilski;R. T. Littleton IV;Terry M. Tritt .Investigation of the thermal conductivity of the mixed pentatellurides Hf_(1-x)Zr_(x)Te_(5)[J].Applied physics letters,2000(15):2319-2321.
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