电化学原子力显微镜(ECAFM)可以在液体环境下工作,能原位观察电极反应过程中的腐蚀界面形貌.文章介绍利用ECAFM从纳米空间分辨度上原位研究离子束增强沉积TaN膜在0.4mol/L HCl溶液中的局部腐蚀早期过程,结果发现,表面形貌为颗粒状结构的TaN膜在0.4mol/L HCl中进行阳极极化时,颗粒结构的微观顶峰优先溶解,导致颗粒高度降低,边界扩大蔓延,使膜层表面趋于平整化.
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