采用电弧离子镀技术在钛合金表面制备CrN涂层,利用扫描电镜(SEM)、X射线衍射仪(XRD)以及透射电镜(TEM)分析了弧电流对涂层组织结构以及力学性能的影响.结果表明,随着弧电流的升高,涂层沉积速率增大,表面熔滴的数量及尺寸增大,表面平整度明显下降.不同弧电流条件下均沉积出CrN单相涂层.弧电流改变了粒子、离子的轰击作用,从而影响到涂层表面的能量状态,CrN涂层的择优生长由(111)变为(200),(220).随着弧电流的增加,CrN涂层的硬度先增大后减小,而涂层与基材间的结合力以及涂层的摩擦系数逐渐增大.弧电流为65A时涂层生长具有较高的沉积速率和较低的沉积温度,可获得尺寸较小的涂层组织.
参考文献
[1] | SCHULZ H;BERGMANN E .Properties and applications of ion-plated coatings in the system Cr-C-N[J].Surface and Coatings Technology,1991,50:53-56. |
[2] | BENIEN H;MAUSHART J;MEYER M et al.D C magnetron sputtering of oxidation-resistant chromium and CrN films monitored by optical emission spectrometry[J].Matersci Eng(A),1991,139:126-131. |
[3] | 唐宾,李咏梅,秦林,吴培强.离子束增强沉积CrN膜层及其微动摩擦学性能研究[J].材料热处理学报,2005(03):58-60. |
[4] | 郭军霞,蔡珣,陈秋龙.类金刚石碳膜的结构及其微动磨损行为[J].材料保护,2003(09):15-18. |
[5] | Park JH;Chung WS;Cho YR;Kim KH .Synthesis and mechanical properties of Cr-Si-N coatings deposited by a hybrid system of arc ion plating and sputtering techniques[J].Surface & Coatings Technology,2004(0):425-430. |
[6] | 赵晚成,马亚军,李生华,金元生,王玉琮,Simon C Tung.CrN 活塞环涂层的磨擦学性能[J].润滑与密封,2005(02):59-62,66. |
[7] | Shin, SH;Kim, MW;Kang, MC;Kim, KH;Kwon, DH;Kim, JS .Cutting performance of CrN and Cr-Si-N coated end-mill deposited by hybrid coating system for ultra-high speed micro machining[J].Surface & Coatings Technology,2008(22/23):5613-5616. |
[8] | Lee DB.;Kwon SC.;Lee YC. .High temperature oxidation of a CrN coating deposited on a steel substrate by ion plating[J].Surface & Coatings Technology,2001(2/3):227-231. |
[9] | ENSINGER W;KIUCHI M .Cubic nitrides of the sixth group of transition metals formed by nitrogen ion irradiation during metal condensation[J].Surface and Coatings Technology,1996,84:425-428. |
[10] | Bertrand G;Savall C;Meunier C;Lab Phys & Metrol Oscillateurs Equipe Elect Solides UPR 3203 F-25200 Montbeliard France. .Properties of reactively RF magnetron-sputtered chromium nitride coatings[J].Surface & Coatings Technology,1997(2/3):323-329. |
[11] | 张晓柠,陈康敏,郑陈超,黄燕,关庆丰,宫磊,孙超.脉冲偏压对电弧离子镀CrNx薄膜组织结构与性能的影响[J].航空材料学报,2010(05):73-77. |
[12] | 陈康敏,张晓柠,郑陈超,黄燕,关庆丰,宫磊,孙超.氮气分压对电弧离子镀CrNx薄膜组织结构的影响[J].真空科学与技术学报,2010(06):662-666. |
[13] | 陈康敏,关庆丰,潘励,孙超,王启民,闻立时.电弧离子镀NiCoCrAlY涂层的透射电镜研究[J].真空科学与技术学报,2009(01):21-25. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%