为了提高CVI法制备C/SiC复合材料的致密化速度,提出了连续同步CVI(CSCVI)法制备C布增韧SiC基复合材料的技术路线,制备了C/SiC复合材料,并观察了其微观结构.实验结果表明,在CSCVI工艺中,SiC基体沉积速度越快,材料的致密化程度越大且致密效果越好.同时,SiC基体沉积速度只由沉积温度与MTS(CH3SiCl3)流量控制,使工艺的可操作性增强,工艺参数可在较大范围内变动.
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