采用正交实验研究了阳极氧化时温度、时间、电压对氧化铝膜厚度、孔径和孔有序度的影响.首次用数学方法定量分析了氧化工艺对孔有序度的影响.通过SEM扫描电镜观察了氧化膜的表面形貌.结果表明,对膜厚影响的主次因素依次为氧化时间、温度和电压,对膜孔径和有序度影响的主次因素依次为电压、温度和时间.
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