采用离子束溅射法在氧化钇稳定的氧化锆(YSZ)衬底和铝酸镧(LaAlO3)衬底上溅射Ln0.5Sr0.5CoO3-δ(Ln=La ,Pr ,Nd )薄膜.测试了不同工艺制备的Ln0.5Sr0.5CoO3-δ薄膜的XRD谱和XPS谱,研究了不同衬底上Ln0.5Sr0.5CoO3-δ薄膜微结构及化学状态.结果表明,在YSZ 衬底上制备的Ln0.5Sr0.5CoO3-δ薄膜氧空位浓度相应的高于在LaAlO3衬底上的氧空位浓度,Nd0.5Sr0.5CoO3-δ /YSZ薄膜的氧空位浓度最高,有利于提高氧离子的输运性.
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