借助XRD、纳米压痕、SEM和划痕仪研究了采用磁控溅射在硬质合金基体上沉积的TiN、(Ti,Al)N单层和TiN/(Ti,A I)N多层涂层的组织结构和力学性能.研究表明:面心立方结构的TiN涂层晶粒形貌为典型的喇叭口结构,沿(200)、(111)择优生长;TiN涂层的硬度为24.6GPa;与硬质合金基体的结合强度约为62N.
参考文献
| [1] | A. Raveh;M. Weiss;M. Pinkas;D. Z. Rosen;G. Kimmel .Graded Al-AlN, TiN, and TiAlN multilayers deposited by radio-frequency reactive magnetron sputtering[J].Surface & Coatings Technology,1999(2/3):269-277. |
| [2] | S A Barnett;M Shinn .Plastic and elastic properties of compositionally modulated thin films[J].Annual Review of Materials Science,1994,24:481-511. |
| [3] | U Helmersson;S Todorova;S A Barnett et al.Growth of singlecrystal TiN/VN strained-lay superlattice with extremely high mechanical hardness[J].Journal of Applied Physics,1987,62:481-484. |
| [4] | P. Yashar;S. A. Barnett;J. Rechner;W. D. Sproul .Structure and mechanical properties of polycrystalline CrN/TiN superlattices[J].Journal of Vacuum Science & Technology, A. Vacuum, Surfaces, and Films,1998(5):2913-2918. |
| [5] | M Shinn;S A Barnett .Effect of superlattice layer elastic moduli on hardness[J].Applied Physics Letters,1994,64(01):61-63. |
| [6] | P M Andson;C Li .Hall-petch relations for multilayered materials[J].Nano-Structured Materials,1995,5:349-362. |
| [7] | S. Veprek;P. Nesladek;A. Niederhofer;F. Glatz;M. Jilek;M. Sima .Recent progress in the superhard nanocrystalline composites: towards their industrialization and understanding of the origin of the superhardness[J].Surface & Coatings Technology,1998(1/3):138-147. |
| [8] | J. Musil;H. Hruby .Superhard nanocomposite Ti{sub}(1-x)Al{sub}xN film prepared by magnetron sputtering[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1):104-109. |
| [9] | 田明波;刘德令.薄膜科学与技术手册[M].北京:机械工业出版社,1991:730-807. |
| [10] | W C Oliver;G M Pharr .An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiment[J].Journal of Materials Research,1992,7(06):1564-1583. |
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