通过射频磁控溅射法，在不锈钢金属托槽表面制备了不同厚度的TiO2－x Nx 薄膜。薄膜的晶体结构，表面形貌和表面粗糙度分别通过 X 射线衍射、扫描电子显微镜和2206型表面粗糙度测量仪分析。通过14FW往复摩擦磨损测试仪考察薄膜托槽体外摩擦性能。结果显示，所制备的纳米 TiO2－x Nx 薄膜为锐钛矿型，结构均匀致密。不同厚度的 TiO2－x Nx 薄膜托槽的动、静摩擦系数不论干燥或湿润条件下均小于对照组。在同一湿性环境下，随薄膜厚度增加 TiO2－x Nx 薄膜托槽摩擦系数呈递减趋势。TiO2－x Nx 薄膜托槽表现出了良好的低摩擦性能。
This study investigated was to by using the radio frequency magnetron sputtering method was used to the surface of the stainless steel brackets by changing the sputtering time to prepare different samples N-doped TiO2-x Nx films of different thicknesses.The film crystal structure,surface morphology and surface roughness were by X-ray diffraction,scanning electron microscopy and 2206-type surface roughness measuring instru-ment,respectively.By 14FW reciprocating friction and wear tester investigated TiO2-xNx film brackets friction properties in vitro.The results show that the microstructure of the nano N-doped TiO2-x Nx films was anatase, uniform and compact structure.Dynamic and static friction coefficient of different thicknesses of TiO2-x Nx film brackets whether under dry or wet conditions were less than the control group.In the same moist environment, with the film thickness increases TiO2-x Nx film brackets friction coefficient showed a decreasing trend.The TiO2-x Nx film brackets showed a good low friction properties.
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