采用离子辅助增强磁控溅射与离子蒸发镀二元组合源设备在高速钢基体沉积出微量 Al 掺杂的TiN涂层(Al-TiN),利用扫描电子显微镜、X射线衍射仪、显微硬度计对涂层的组成成分、相结构、膜基结合力及显微硬度进行了分析；用摩擦磨损实验机及台阶仪分析了薄膜的摩擦磨损性能。研究了微量 Al 掺杂对薄膜的微结构及性能的影响。结果表明,TiN 涂层中微量Al的存在使涂层的膜基结合力、耐摩擦磨损性能得到明显改善。
Al-TiN coating deposited on high speed steel by plasma enhanced magnetron sputtering ion plating and evaporating deposition combination sources equipment.Study on the effect of little Al doped on the micro-structure and mechanical properties of TiN coating.The elements,phase structure,film-substrate cohesion and microhardness were characterized by scanning electron microscopy (SEM),X-ray diffraction (XRD),micro-hardness meter;the wear resistance was investigated with CSEM pin-on-disk wear test apparatus and step profi-ler.The results show that the addition of little Al make the film-substrate cohesion and wear resistance are evi-dently improved.
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