对近年来聚合物纳米/亚微米结构零件注射成型的研究进展进行综述,着重阐述成型材料、模芯材料和成型工艺对纳米/亚微米结构成型复制质量的影响,以及纳注射成型过程中的辅助成型技术和模芯制造方法.在此基础上,提出了纳注射成型技术中存在的问题,并对其发展进行展望.
参考文献
[1] | 唐天同;王兆宏.微纳加工科学原理[M].北京:电子工业出版社,2010:207-276. |
[2] | GATES B D;XU Q;STEWART M .New approaches to nanofabrication molding,printing,and other[J].CHEMICAL REVIEWS,2005,105(04):1171-1196. |
[3] | 刘方辉,钱心远,张杰.注塑成型新技术的发展概况[J].塑料科技,2009(03):83-88. |
[4] | 姜爱菊,WU Hong-wu.微注射成型技术的最新进展[J].塑料工业,2008(08):1-4,10. |
[5] | 庄俭,于同敏,王敏杰.微注塑成形中熔体充模流动分析及其数值模拟[J].机械工程学报,2008(09):43-49. |
[6] | Kari Monkkonen;Joni Hietala;Pertti Paakkonen;Esko J.Paakkonen;Terho Kaikuranta;Tuula T.Pakkanen;Timo Jaaskelainen .Replication of sub-micron features using amorphous thermoplastics[J].Polymer engineering and science,2002(7):1600-1608. |
[7] | 蒋炳炎,蓝才红,汤美林.微结构特征对微结构零件注射成型流场均匀性的影响[J].高分子材料科学与工程,2008(08):9-12. |
[8] | MACINTYRE D;THOMS S .The fabrication of high resolution features by mould injection[J].Microelectronic Engineering,1998,41-42:211-214. |
[9] | SCHIFT H;DAVID C;GABRIEL M et al.Nanoreplication in polymers using hot embossing and injection molding[J].Microelectronic Engineering,2000,53(01):171-174. |
[10] | 王唯讚 .以分子動力學模擬奈米尺度下射出成型之充填遇程[D].台湾:国立清华大学,2006. |
[11] | T. R. Tofteberg;E. Andreassen .Multiscale Simulation of Injection Molding of Parts with Low Aspect Ratio Microfeatures[J].International Polymer Processing: The Journal of the Polymer Processing Society,2010(1):63-75. |
[12] | KISARAGI Y .Molecular dynamics simulation of injection of polyethylene fluid in a variable cross-section nano-channel[J].Chinese Science Bulletin,2011,17(56):1848-1856. |
[13] | 楚纯朋,蒋炳炎,刘瑶,蓝才红.聚合物微流控芯片微通道复制成型技术[J].塑料工业,2008(10):1-5. |
[14] | Chia-Wen Tsao;Don L. DeVoe .Bonding Of Thermoplastic Polymer Microfluidics[J].Microfluidics and nanofluidics,2009(1):1-16. |
[15] | Huang CK .Rapid replication of nanostructures made with a polymer using simple injection molding[J].Journal of Applied Polymer Science,2008(1):497-500. |
[16] | A.-C. Liou;R.-H. Chen .Injection molding of polymer micro- and sub-micron structures with high-aspect ratios[J].The International Journal of Advanced Manufacturing Technology,2006(11/12):1097-1103. |
[17] | YOON S;SRIROJPINYO C;LEE J et al.Investigation of tooling surfaces on injection molded nanoscale features[J].NSTI Nanotechnology,2004,3:460-463. |
[18] | BRUCK R;HAINBERGER R;HEER R.Direct replication of nanostructures from silicon wafers in polymethylpentene by injection molding[A].San Diego:International Society for Optics and Photonics,2010 |
[19] | 晋星星 .基于PMMA模具的聚合物纳米沟道热压成形[D].大连:大连理工大学,2012. |
[20] | Maria Matschuk;Niels B. Larsen .Injection molding of high aspect ratio sub-100 nm nanostructures[J].Journal of Micromechanics and Microengineering,2013(2):025003-1-025003-10. |
[21] | Huang-Ya Lin;Ching-Ho Chang;Wen-Bin Young .Experimental and analytical study on filling of nano structures in micro injection molding[J].International Communications in Heat and Mass Transfer: A Rapid Communications Journal,2010(10):1477-1486. |
[22] | Rapid injection molding of high-aspect-ratio nanostructures[J].Microelectronic engineering,2010(5/8):1546. |
[23] | John M. Stormonth-Darling;Nikolaj Gadegaard .Injection Moulding Difficult Nanopatterns with Hybrid Polymer Inlays[J].Macromolecular materials and engineering,2012(11):1075-1080. |
[24] | GADEGAARD N;GREAME HERLIHY .Injection moulding nanostructures for medical applications[EB/OL].http://www.spra.org.uk/news/201202/injection-mouldingnanostructures-medical applications,2014-01-21. |
[25] | Mark Telford .THe case for bulk metallic glass[J].Materials Today,2004(3):35-43. |
[26] | Golden Kumar;Hong X. Tang;Jan Schroers .Nanomoulding With Amorphous Metals[J].Nature,2009(7231):868-872. |
[27] | Nan Zhang;Cormac J. Byrne;David J. Browne;Michael D. Gilchrist .Towards nano-injection molding[J].Materials Today,2012(5):216-221. |
[28] | 袁巨龙,张飞虎,戴一帆,康仁科,杨辉,吕冰海.超精密加工领域科学技术发展研究[J].机械工程学报,2010(15):161-177. |
[29] | 于同敏,宫德海.微型模具制造技术研究与发展[J].中国机械工程,2005(02):179-183. |
[30] | CHEN K;CHEN C D;MA K J .Electron beam lithography in nanoscale fabrication:recent development[J].IEEE Transactions on Electronics Packaging Manufacturing,2003,26(02):141-149. |
[31] | Vieu C.;Pepin A.;Chen Y.;Mejias M.;Lebib A. Manin-Ferlazzo L.;Couraud L.;Launois H.;Carcenac F. .Electron beam lithography: resolution limits and applications[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2000(0):111-117. |
[32] | Pranov H;Rasmussen HK;Larsen NB;Gadegaard N .On the injection molding of nanostructured polymer surfaces[J].Polymer engineering and science,2006(2):160-171. |
[33] | Morten Bo Mikkelsen;Alban A. Letailleur;Elin Sondergard .All-silica nanofluidic devices for DNA-analysis fabricated by imprint of sol-gel silica with silicon stamp[J].Lab on a chip,2012(2):262-267. |
[34] | Liu, J.;Qiao, H.;Xu, Z.;Liu, C.;Wang, J.;Du, L.;Zhang, X.;Wang, L. .Fabrication of planar nanofluidic channels in thermoplastic polymers by O2 plasma etching[J].Micro & nano letters,2012(2):159-162. |
[35] | NAGATO K;HAMAGUCHI T;NAKAO M .Injection compression molding of high-aspect-ratio nanostructures[J].Journal of Vacuum Science and Technology B:Microelectronics and Nanometer Structures,2011,29(06):6-10. |
[36] | P. E. Shao;A. van Kan;L. P. Wang;K. Ansari;A. A. Bettiol;F. Watt .Fabrication of enclosed nanochannels in poly(methylmethacrylate) using proton beam writing and thermal bonding[J].Applied physics letters,2006(9):093515-1-093515-3-0. |
[37] | ITO H;SUZUKI H;KAZAMA K et al.Polymer structure and properties in micro and nanomolding process[J].Current Applied Physics,2009,9(02):19-24. |
[38] | Nanostructures for all-polymer microfluidic systems[J].Microelectronic engineering,2010(5/8):1379. |
[39] | UTKO P;PERSSON F;KRISTENSEN A et al.Injection molded nanofluidic chips:fabrication method and functional tests using single-molecule DNA experiments[J].Lab on a Chip,2010,11(02):303-308. |
[40] | Nikolaj Gadegaard;Stephan Mosler;Niels B. Larsen .Biomimetic Polymer Nanostructures by Injection Molding[J].Macromolecular materials and engineering,2003(1):76-83. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%