利用射频磁控溅射方法(衬底温度20℃)制备TaN,ReB2单层膜及ReB2/TaN纳米多层膜,并通过XRD,SEM,XP-2表面轮廓仪及纳米力学测试系统对薄膜的微结构和力学性能进行表征,分析调制周期对其影响.结果表明:TaN和ReB2均具有典型的六方结构,在其构成的多层膜中,当调制周期达到8～12nm附近时,纳米多层膜的硬度和弹性模量均高于两种材料所构成单层膜的相应值.在A=9.6nm,多层膜达到最高硬度(28.8GPa)及弹性模量(345.9GPa),同时内应力取得较好结果.
参考文献
| [1] | Li DJ;Wang M;Zhang JJ .Structural and mechanical responses of (Zr,AI)N/ZrB2 superlattice coatings to elevated-temperature annealing[J].Materials Science & Engineering, A. Structural Materials: Properties, Misrostructure and Processing,2006(1-2):116-120. |
| [2] | LI Dejun.Synthesis of ZrAlN coatings with thermal stability at high temperature[J].中国科学E辑（英文版）,2006(05):576-581. |
| [3] | 喻利花,董师润,许俊华,李戈扬.TaN/TiN和NbN/TiN纳米结构多层膜超硬效应及超硬机理研究[J].物理学报,2008(11):7063-7068. |
| [4] | 邱成军,曹茂盛,朱静,杨慧静.纳米薄膜材料的研究进展[J].材料科学与工程,2001(04):132-137. |
| [5] | KOEHLER J S .Attempt to design a strong solid[J].Physical Review B,1970,2(02):547-551. |
| [6] | KATO M;MORI T;SCHWARTZ L H .Hardening by spinodal modulated structure[J].Acta Metallurgica,1980,28(03):285-290. |
| [7] | ANDERSON P M;LI C .Hall-Perch relations for multilayered materials[J].Nano-Structured Materials,1995,5(03):349-362. |
| [8] | XIONG Lan-Tian,CAO Mao-Sheng,HOU Zhi-Ling.Crystal Structure and High Hardness Mechanism of Orthorhomic Si2N2O[J].中国物理快报（英文版）,2009(07):229-231. |
| [9] | 曹茂盛,杨会静,刘爱东,王彪,周振功.Ni-P-Si纳米粒子化学复合镀工艺及力学性能研究[J].中国表面工程,2000(03):42-46. |
| [10] | Alessandro Latini;Julietta V. Rau;Daniela Ferro .Superhard Rhenium Diboride Films: Preparation and Characterization[J].Chemistry of Materials: A Publication of the American Chemistry Society,2008(13):4507-4511. |
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