以钨粉和双氧水为主要原料,采用溶胶-凝胶法及旋转涂膜技术在K9玻璃上制备了WO3纳米薄膜,然后用磁控溅射法在该WO3薄膜表面溅射掺杂了Pt作催化剂.将此Pt-WO3薄膜分别在100～500℃的氮气环境中进行热处理,用XRD,AFM,分光光度计等观察了薄膜的结构和表面形貌,分析了薄膜的微观结构及热处理温度和催化剂含量对薄膜的结构和氢敏性能的影响.结果表明,薄膜经400℃以下热处理后是非晶态结构,表面疏松多孔,透光率较高,氢敏效果好;经400℃以上热处理后呈晶态结构,表面粗糙致密,透光率较低,氢敏效果差;催化剂Pt的含量对薄膜的氢敏效果有影响,当含量为5%(质量分数)时,Pt-WO3薄膜的氢敏感性能较好.
参考文献
| [1] | Xiuli He;Jianping Li;Xiaoguang Gao;Li Wang .NO_2 sensing characteristics of WO_3 thin film microgas sensor[J].Sensors and Actuators, B. Chemical,2003(1/3):463-467. |
| [2] | STANKOVA M;VILANOVA X;CALDERER J et al.Detec-tion of SO2 and H2S in CO2 stream by means of WO3-based micro-hotplate sensors[J].Sensors and Actuators B:Chemical,2004,102(02):219-225. |
| [3] | Blo M;Carotta MC;Galliera S;Gherardi S;Giberti A;Guidi V;Malagu C;Martinelli G;Sacerdoti M;Vendemiati B .Synthesis of pure and loaded powders of WO3 for NO2 detection through thick film technology[J].Sensors and Actuators, B. Chemical,2004(1/2):213-218. |
| [4] | Ionescu R;Hoel A;Granqvist CG;Llobet E;Heszler P .Low-level detection of ethanol and H2S with temperature-modulated WO3 nanoparticle gas sensors[J].Sensors and Actuators, B. Chemical,2005(1):132-139. |
| [5] | 汪文娟,黎先财,杨沂凤,饶国华.WO3基材料的气敏性研究进展[J].江西化工,2005(01):79-81. |
| [6] | Shanak H;Schmitt H;Nowoczin J;Ziebert C .Effect of Pt-catalyst on gasochromic WO3 films: optical, electrical and AFM investigations[J].Solid state ionics,2004(1/2):99-106. |
| [7] | S. Okazaki;H. Nakagawa;S. Asakura;Y. Tomiuchi;N. Tsuji;H. Murayama;M. Washiya .Sensing characteristics of an optical fiber sensor for hydrogen leak[J].Sensors and Actuators, B. Chemical,2003(1/3):142-147. |
| [8] | Lee KH.;Lee WJ.;Ho JJ.;Chen KH.;Liao KC.;Fang YK. .Novel electrochromic devices (ECD) of tungsten oxide (WO3) thin film integrated with amorphous silicon germanium photodetector for hydrogen sensor[J].Sensors and Actuators, B. Chemical,2000(1/2):96-99. |
| [9] | Sekimoto S.;Okazaki S.;Fukuda K.;Asakura S.;Shigemori T. Takahashi S.;Nakagawa H. .A fiber-optic evanescent-wave hydrogen gas sensor using palladium-supported tungsten oxide[J].Sensors and Actuators, B. Chemical,2000(1/3):142-145. |
| [10] | 庄琳,徐雪青,沈辉.热处理对WO3薄膜的结构和气致变色性能的影响[J].材料导报,2002(04):72-74. |
| [11] | Stankova A;Vilanova X;Llobet E;Calderer J;Bittencourt C;Pireaux JJ;Coffeig X .Influence of the annealing and operating temperatures on the gas-sensing properties of rf sputtered WO3 thin-film sensors[J].Sensors and Actuators, B. Chemical,2005(2):271-277. |
| [12] | Guerin J;Aguir K;Bendahan M;Lambert-Mauriat C .Thermal modelling of a WO3 ozone sensor response[J].Sensors and Actuators, B. Chemical,2005(2):289-293. |
| [13] | 侯长军,范小花,范瑛,唐一科.氢敏材料的研究进展[J].电子元件与材料,2006(10):1-5. |
| [14] | DIETMAR S;ANDREAS G .Examination of the kinetics and performanee of a catalytically switching (gasochromic) device[J].Solar Energy Materials and Solar Cells,1998,54:99-108. |
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