根据大气(APS)和低压等离子喷涂(LPPS)的特点,采用两种不同的高纯氧化铝粉末制备了高纯氧化铝涂层.分别采用XRD和SEM对两种涂层的相和结构进行了研究,对涂层的显微硬度和断裂韧性进行了评价,并对涂层制备工艺和性能的关系进行了分析.结果表明:低压等离子喷涂制备的高纯氧化铝涂层韧性和致密性明显优于常压喷涂氧化铝涂层.
参考文献
| [1] | 戴达煌;周克崧;袁镇海.现代材料表面技术科学[M].北京:冶金工业出版社,2004 |
| [2] | 翟长生,巫瑞智,王海军,周世魁,孙宝德.HEPJet等离子喷涂Al2O3性能试验研究[J].材料工程,2004(12):47-50,55. |
| [3] | Giovanni Bolelli;Valeria Cannillo;Luca Lusvarghi;Tiziano Manfredini .Wear behaviour of thermally sprayed ceramic oxide coatings[J].Wear: an International Journal on the Science and Technology of Friction, Lubrication and Wear,2006(11/12):1298-1315. |
| [4] | 张罡,武颖娜,梁勇,冯钟潮,巴瑞章.等离子喷涂Al2O3与ZrO2复合热障涂层的高温性能[J].稀有金属材料与工程,2003(09):756-760. |
| [5] | CHARLES W M .Electrical breakdown of thermal spray alumina ceramic applied to AlSiC baseplates used in power module packaging[D].Virginia:Virginia Polytechnic Institute and State University,1999. |
| [6] | J. H. Ouyang;S. Sasaki .Tribological characteristics of low-pressure plasma-sprayed Al{sub}2O{sub}3 coating from room temperature to 800℃[J].Tribology International,2005(1):49-57. |
| [7] | GORDON .Substrate coating and semiconductor processing method of improving uniformity of liquid deposition[P].US 6555276,2003-04-29. |
| [8] | KITAMURA J;IBE H;MIZUNO H.Erosion properties of plasma sprayed ceramic coatings against process plasma in semiconductor production equipment[A].Ohio,USA:ASM International,Materials Park,2007 |
| [9] | EDDY BASS;ROBERT WRIGHT .Modeling semiconductor factories for equipment and cycle time reduction opportunity[EB/OL].http://www.future-fab.com/content/PDF/ff24_current_issue.pdf,2008-01. |
| [10] | 刘勇,陈晓银.氧化铝热稳定性的研究进展[J].化学通报,2001(02):65-70. |
| [11] | EVANS A G;WILSHAW T R .Quasi-static solid particle damage in brittle solids.Pt.1.observations,analysis and implications[J].Acta Metallurgica,1976,24(10):939-956. |
| [12] | 李喜坤,修稚萌,孙旭东,郑龙熙.常压烧结制备Al2O3/TiCN复合陶瓷材料[J].硅酸盐学报,2003(11):1069-1074. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%