磁头表面超薄DLC保护层厚度测量研究

1.哈尔滨工业大学,哈尔滨,150001

2.哈尔滨工业大学,哈尔滨,150001

3.哈尔滨工业大学,哈尔滨,150001

4.东莞新科材料科学实验室,广东,东莞,523087

5.东莞新科材料科学实验室,广东,东莞,523087

Investigation on Thickness of Ultra-thin Carbon Protective Coatings on Slider Surface

研究了测量磁头表面超薄DLC薄膜和Si中间层厚度的方法,所用的设备有:AES,XPS,TEM.研究结果显示,XPS和AES测量的结果较为吻合,TEM的结果则存在较大差异.在TEM高分辩像下无法分清DLC和Si层,并对AES,XPS和TEM结果产生差异的原因进行了分析.

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